Ion mass influence on transient enhanced diffusion and boron clustering in silicon: Deviation from the "+1" model
- Herner, S.B.
- Gossmann, H.-J.
- Pelaz, L.P.
- Gilmer, G.H.
- Jaraíz, M.
- Jacobson, D.C.
- Eaglesham, D.J.
ISSN: 0021-8979
Year of publication: 1998
Volume: 83
Issue: 11
Pages: 6182-6184
Type: Article