Modeling of the effects of dose, dose rate, and implant temperature on transient enhanced diffusion
- Pelaz, L.
- Gilmer, G.H.
- Venezia, V.C.
- Gossmann, H.-J.
- Jaraiz, M.
- Barbolla, J.
ISSN: 0003-6951
Year of publication: 1999
Volume: 74
Issue: 14
Pages: 2017-2019
Type: Article