Yuri
Erokhin
Publications by the researcher in collaboration with Yuri Erokhin (3)
1998
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Boron-enhanced-diffusion of boron from ultra-low-energy boron implantation
SILICON MATERIALS SCIENCE AND TECHNOLOGY, VOLS 1 AND 2
1997
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Boron-Enhanced-Diffusion of boron: The limiting factor for ultra-shallow junctions
Technical Digest - International Electron Devices Meeting, IEDM
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Reduction of transient diffusion from 1-5 keV Si+ ion implantation due to surface annihilation of interstitials
Applied Physics Letters, Vol. 71, Núm. 21, pp. 3141-3143