Electronica
STMicroelectronics
Ginebra, SuizaPublikationen in Zusammenarbeit mit Forschern von STMicroelectronics (2)
2014
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Kinetic Monte Carlo simulations of boron activation in implanted Si under laser thermal annealing
Applied Physics Express, Vol. 7, Núm. 2
2007
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Atomistic modeling and physical comprehension of the effects of implant dose rate on boron activation in pMOSFET S/D
ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference