Interfacial State Density and Conductance-Transient Three-Dimensional Profiling of Disordered-Induced Gap States on Metal Insulator Semiconductor Capacitors Fabricated from Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposited SiOxNyHz Films

1. Castán, H.
2. Dueñas, S.
3. Barbolla, J.
4. Del Prado, Á.
5. Mártil, I.
6. González-Díaz, G.