Interface quality of Sc2O3 and Gd2O 3 films based metal-insulator-silicon structures using Al, Pt, and Ti gates: Effect of buffer layers and scavenging electrodes

  1. Gómez, A.
  2. Castán, H.
  3. García, H.
  4. Dueñas, S.
  5. Bailón, L.
  6. Pampillón, M.A.
  7. Feijoo, P.C.
  8. San Andrés, E.
Zeitschrift:
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

ISSN: 2166-2754 2166-2746

Datum der Publikation: 2013

Ausgabe: 31

Nummer: 1

Art: Artikel

DOI: 10.1116/1.4768678 GOOGLE SCHOLAR