Study of the vapor-assisted method for bonding PDMS and glass: Effect of the vapor source

  1. Sofla, A.Y.N.
  2. Martin, C.
Aldizkaria:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Argitalpen urtea: 2010

Alea: 20

Zenbakia: 12

Mota: Artikulua

DOI: 10.1088/0960-1317/20/12/125024 GOOGLE SCHOLAR