Electrical characteristics of anodic tantalum pentoxide thin films under thermal stress

  1. Dueñas, S.
  2. Castán, H.
  3. Barbolla, J.
  4. Kola, R.R.
  5. Sullivan, P.A.
Aldizkaria:
Microelectronics Reliability

ISSN: 0026-2714

Argitalpen urtea: 2000

Alea: 40

Zenbakia: 4-5

Orrialdeak: 659-662

Mota: Artikulua

DOI: 10.1016/S0026-2714(99)00310-8 GOOGLE SCHOLAR