Enhanced modelization of ion implant simulation in compound semiconductors
- Hernández-Mangas, J.M.
- Enriquez, L.
- Arias, J.
- Jaraíz, M.
- Bailón, L.
ISSN: 0038-1101
Year of publication: 2002
Volume: 46
Issue: 9
Pages: 1315-1324
Type: Article
ISSN: 0038-1101
Year of publication: 2002
Volume: 46
Issue: 9
Pages: 1315-1324
Type: Article