Properties of AlGaAs layers grown on Si by the conformal method

  1. Martínez, O.
  2. Ardila, A.M.
  3. Avella, M.
  4. Jiménez, J.
  5. Gerard, B.
  6. Philippens, M.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2002

Volume: 91-92

Pages: 91-95

Type: Conference paper

DOI: 10.1016/S0921-5107(01)00980-1 GOOGLE SCHOLAR