Boron diffusion in amorphous silicon and the role of fluorine

1. Duffy, R.
2. Venezia, V.C.
3. Heringa, A.
4. Pawlak, B.J.
5. Hopstaken, M.J.P.
6. Maas, G.C.J.
7. Tamminga, Y.
8. Dao, T.
9. Roozeboom, F.
10. Pelaz, L.