Effect of amorphization on activation and deactivation of boron in source/drain, channel and polygate

1. Pawlak, B.J.
2. Duffy, R.
3. Janssens, T.
4. Vandervorst, W.
5. Severi, S.
6. Richard, O.
7. Benedetti, A.
8. Eyben, P.
9. Colombeau, B.
10. Cowern, N.E.B.
11. Camillo-Castillo, R.A.
12. Jones, K.S.
13. Aboy, M.