Ion-beam amorphization of semiconductors: A physical model based on the amorphous pocket population
- Mok, K.R.C.
- Jaraiz, M.
- Martin-Bragado, I.
- Rubio, J.E.
- Castrillo, P.
- Pinacho, R.
- Barbolla, J.
- Srinivasan, M.P.
Zeitschrift:
Journal of Applied Physics
ISSN: 0021-8979
Datum der Publikation: 2005
Ausgabe: 98
Nummer: 4
Art: Artikel