Comparative study on electrical properties of atomic layer deposited high-permittivity materials on silicon substrates

  1. Dueñas, S.
  2. Castán, H.
  3. García, H.
  4. Barbolla, J.
  5. Kukli, K.
  6. Ritala, M.
  7. Leskelä, M.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 2005

Volumen: 474

Número: 1-2

Pages: 222-229

Type: Article

DOI: 10.1016/J.TSF.2004.09.012 GOOGLE SCHOLAR