Atomistic process modeling based on kinetic Monte Carlo and molecular dynamics for optimization of advanced devices

  1. Pelaz, L.
  2. Marques, L.
  3. Aboy, M.
  4. Lopez, P.
  5. Santos, I.
  6. Duffy, R.
Actes de conférence:
Technical Digest - International Electron Devices Meeting, IEDM

ISSN: 0163-1918

ISBN: 9781424456406

Année de publication: 2009

Type: Communication dans un congrès

DOI: 10.1109/IEDM.2009.5424309 GOOGLE SCHOLAR