Electrical characterization of ZrO2-based MIS structures with highly doped Si substrates
- Gómez, A.
- Dueñas, S.
- Castán, H.
- García, H.
- Bailón, L.
- Kukli, K.
- Niinistö, J.
- Ritala, M.
- Leskelä, M.
Actes de conférence:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
ISBN: 9781424428397
Année de publication: 2009
Pages: 227-230
Type: Communication dans un congrès
