Study of atomic layer deposited zirconium oxide thin films by using mono-cyclopentadienyl based precursors
- Castán, H.
- Dueñas, S.
- García, H.
- Gómez, A.
- Bailón, L.
- Kukli, K.
- Niinistö, J.
- Ritala, M.
- Leskelä, M.
Aktak:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
ISBN: 9781424428397
Argitalpen urtea: 2009
Orrialdeak: 8-11
Mota: Biltzar ekarpena