A complete suite of experimental techniques for electrical characterization of conventional and incoming high-k dielectric-based devices

  1. Duenas, S.
  2. Castán, H.
  3. García, H.
  4. Arroval, T.
  5. Tamm, A.
  6. Kukli, K.
  7. Aarik, J.
Proceedings:
ECS Transactions

ISSN: 1938-5862,  1938-6737

ISBN: 9781607687122

Year of publication: 2016

Volume: 72

Issue: 2

Pages: 153-165

Type: Conference paper

DOI: 10.1149/07202.0153ECST GOOGLE SCHOLAR

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