Phase stepping microscopy for layer thickness measurement in silicon-on-insulator structures

  1. Martín, E.
  2. Sanz, L.F.
  3. Jiménez, J.
  4. Pérez-Rodríguez, A.
  5. Morante, J.R.
  6. Aspar, B.
  7. Margail, J.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 1997

Volume: 311

Issue: 1-2

Pages: 225-229

Type: Article

DOI: 10.1016/S0040-6090(97)00681-0 GOOGLE SCHOLAR