Evaluation of free-carrier concentration in Si+-implanted InP by means of photoluminescence

  1. Ibáez, J.
  2. Cuscó, R.
  3. Artús, L.
  4. De La Puente, E.
  5. Jiménez, J.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Année de publication: 2001

Volumen: 175-177

Pages: 246-251

Type: Communication dans un congrès

DOI: 10.1016/S0168-583X(01)00449-9 GOOGLE SCHOLAR