Surface morphology of silicon carbide layers deposited by cyclotron resonance plasma

  1. Gomez, FJ
  2. RodriguezMendez, ML
  3. Piqueras, J
  4. Jimenez, J
  5. DeSaja, JA
Colección de libros:
DEFECT RECOGNITION AND IMAGE PROCESSING IN SEMICONDUCTORS 1995
  1. Mickleson, AR (coord.)

ISSN: 0951-3248

ISBN: 0-7503-0372-7

Ano de publicación: 1996

Volume: 149

Páxinas: 67-72

Congreso: Defect Recognition and Image Processing in Semiconductors 1995 Conference (DRIP VI)

Tipo: Achega congreso

GOOGLE SCHOLAR
Fonte de datos: WoS