A STUDY OF CHANNELING AND INDUCED DAMAGE IN BORON-IMPLANTED SILICON
- Jimenez, J (coord.)
ISSN: 0951-3248
ISBN: 0-7503-0294-1
Argitalpen urtea: 1994
Orrialdeak: 47-50
Biltzarra: 5th International Conference on Defect Recognition and Image Processing in Semiconductors and Devices
Mota: Biltzar ekarpena