Carbon coatings with high concentrations of silicon deposited by RF PECVD method at relatively high self-bias
- Jedrzejczak, A.
- Batory, D.
- Dominik, M.
- Smietana, M.
- Cichomski, M.
- Szymanski, W.
- Bystrzycka, E.
- Prowizor, M.
- Kozlowski, W.
- Dudek, M.
Aldizkaria:
Surface and Coatings Technology
ISSN: 0257-8972
Argitalpen urtea: 2017
Alea: 329
Orrialdeak: 212-217
Mota: Artikulua