Ion-induced effects during reactive sputtering of ITO films

  1. Dudek, M.
  2. Zabeida, O.
  3. Klemberg-Sapieha, J.E.
  4. Martinu, L.
Konferenzberichte:
Proceedings, Annual Technical Conference - Society of Vacuum Coaters

ISSN: 0737-5921

Datum der Publikation: 2005

SVC, Society of Vacuum Coaters - 48th Annual Technical Conference Proceedings

Seiten: 192-196

Art: Konferenz-Beitrag

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