NCD film as an active gate layer in chemFET structures

  1. Guzdek, T.
  2. Szmidt, J.
  3. Dudek, M.
  4. Niedzielski, P.
Journal:
Diamond and Related Materials

ISSN: 0925-9635

Year of publication: 2004

Volume: 13

Issue: 4-8

Pages: 1059-1061

Type: Article

DOI: 10.1016/J.DIAMOND.2003.11.100 GOOGLE SCHOLAR