Grupo de Espectroscopía de Plasmas y Chorros Supersónicos
University of Surrey
Guildford, Reino UnidoPublikationen in Zusammenarbeit mit Forschern von University of Surrey (2)
2006
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Design and optimization of nanoCMOS devices using predictive atomistic physics-based process modeling
Technical Digest - International Electron Devices Meeting, IEDM
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Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth
Materials Research Society Symposium Proceedings