Publicacions en què col·labora amb P. Meunier (4)

2008

  1. Evolution of fluorine and boron profiles during annealing in crystalline Si

    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 26, Núm. 1, pp. 377-381

  2. F+ implants in crystalline Si: The Si interstitial contribution

    Materials Research Society Symposium Proceedings

  3. Si interstitial contribution of F+ implants in crystalline Si

    Journal of Applied Physics, Vol. 103, Núm. 9

2006

  1. Fluorine profile distortion upon annealing by the presence of a CVD grown boron box

    AIP Conference Proceedings