Publicaciones en colaboración con investigadores/as de Laboratory for Analysis and Architecture of Systems (2)

2014

  1. Kinetic Monte Carlo simulations of boron activation in implanted Si under laser thermal annealing

    Applied Physics Express, Vol. 7, Núm. 2

2013

  1. Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD