Emilio
Lora-Tamayo D'Ocón
Publicacions en què col·labora amb Emilio Lora-Tamayo D'Ocón (5)
1994
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Characterization of the damage induced in boron-implanted and RTA annealed silicon by the capacitance-voltage transient technique
Semiconductor Science and Technology, Vol. 9, Núm. 9, pp. 1637-1648
1993
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Electrical characterization of MOS structures fabricated on SF6 and SF6 + C2CIF5 reactive ion etched silicon
Nuclear Inst. and Methods in Physics Research, B, Vol. 80-81, Núm. PART 2, pp. 1362-1366
1992
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A study of metal-oxide-semiconductor capacitors fabricated on SF 6 and SF6+Cl2 reactive-ion-etched Si
Journal of Applied Physics, Vol. 71, Núm. 6, pp. 2710-2716
1990
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Interface state density measurement in MOS structures by analysis of the thermally stimulated conductance
Solid State Electronics, Vol. 33, Núm. 8, pp. 987-992
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Rie-induced damage in MOS structures
Solid State Electronics, Vol. 33, Núm. 11, pp. 1419-1423