Publications by the researcher in collaboration with M.A. Fernández Fernández (2)

1998

  1. Deposition of SiNx: H thin films by the electron cyclotron resonance and its application to Al/SiNx:H/Si structures

    Journal of Applied Physics, Vol. 83, Núm. 1, pp. 332-338

  2. Good quality Al/SiNx:H/InP metal-insulator-semiconductor devices obtained with electron cyclotron resonance plasma method

    Journal of Applied Physics, Vol. 83, Núm. 1, pp. 600-603