María Helena
Castan Lanaspa
Universidad Autónoma de Madrid
Madrid, EspañaPublications in collaboration with researchers from Universidad Autónoma de Madrid (1)
1998
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Good quality Al/SiNx:H/InP metal-insulator-semiconductor devices obtained with electron cyclotron resonance plasma method
Journal of Applied Physics, Vol. 83, Núm. 1, pp. 600-603