Effect of interlayer trapping and detrapping on the determination of interface state densities on high-k dielectric stacks

  1. Castán, H.
  2. Dueñas, S.
  3. García, H.
  4. Gómez, A.
  5. Bailón, L.
  6. Toledano-Luque, M.
  7. Del Prado, A.
  8. Mártil, I.
  9. González-Díaz, G.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 2010

Volume: 107

Issue: 11

Type: Article

DOI: 10.1063/1.3391181 GOOGLE SCHOLAR