Comparison of sub-micron Si:SiGe heterojunction nFETs to Si nMOSFET in present-day technologies

  1. Fobelets, K.
  2. Jeamsaksiri, W.
  3. Papavasilliou, C.
  4. Vilches, T.
  5. Gaspari, V.
  6. Velazquez-Perez, J.E.
  7. Michelakis, K.
  8. Hackbarth, T.
  9. König, U.
Journal:
Solid-State Electronics

ISSN: 0038-1101

Year of publication: 2004

Volume: 48

Issue: 8

Pages: 1401-1406

Type: Article

DOI: 10.1016/J.SSE.2004.01.017 GOOGLE SCHOLAR

Sustainable development goals