Use of anodic tantalum pentoxide for high-density capacitor fabrication

  1. Dueñas, S.
  2. Castán, E.
  3. Barbolla, J.
  4. Kola, R.R.
  5. Sullivan, P.A.
Journal:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Year of publication: 1999

Volume: 10

Issue: 5

Pages: 379-384

Type: Article

DOI: 10.1023/A:1008901624514 GOOGLE SCHOLAR