Atomistic modeling of complex silicon processing scenarios
- Jaraiz, M.
- Castrillo, P.
- Pinacho, R.
- Pelaz, L.
- Barbolla, J.
- Gilmer, G.H.
- Rafferty, C.S.
Aktak:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Argitalpen urtea: 2000
Alea: 610
Mota: Biltzar ekarpena
