Tantalum pentoxide obtained from TaNx and TaSi2 anodisation: An inexpensive and thermally stable high k dielectric

  1. Dueñas, S.
  2. Castán, E.
  3. Barbolla, J.
  4. Kola, R.R.
  5. Sullivan, P.A.
Revue:
Solid-State Electronics

ISSN: 0038-1101

Année de publication: 2001

Volumen: 45

Número: 8

Pages: 1441-1450

Type: Article

DOI: 10.1016/S0038-1101(01)00125-3 GOOGLE SCHOLAR