Algorithm for statistical noise reduction in three-dimensional ion implant simulations
- Hernández-Mangas, J.M.
- Arias, J.
- Jaraiz, M.
- Bailón, L.
- Barbolla, J.
ISSN: 0168-583X
Année de publication: 2001
Volumen: 174
Número: 4
Pages: 433-438
Type: Article