Dopant redistribution effects in preamorphized silicon during low temperature annealing

1. Venezia, V.C.
2. Duffy, R.
3. Pelaz, L.
4. Aboy, M.
5. Heringa, A.
6. Griffin, P.B.
7. Wang, C.C.
8. Hopstaken, M.J.P.
9. Tamminga, Y.
10. Dao, T.
11. Pawlak, B.J.
12. Roozeboom, F.