Physically based modelling of damage, amorphization, and recrystallization for predictive device-size process simulation

  1. Rubio, J.E.
  2. Jaraiz, M.
  3. Martin-Bragado, I.
  4. Pinacho, R.
  5. Castrillo, P.
  6. Barbolla, J.
Aldizkaria:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Argitalpen urtea: 2004

Alea: 114-115

Zenbakia: SPEC. ISS.

Orrialdeak: 151-155

Mota: Biltzar ekarpena

DOI: 10.1016/J.MSEB.2004.07.039 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak