Physically based modelling of damage, amorphization, and recrystallization for predictive device-size process simulation

  1. Rubio, J.E.
  2. Jaraiz, M.
  3. Martin-Bragado, I.
  4. Pinacho, R.
  5. Castrillo, P.
  6. Barbolla, J.
Revista:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Ano de publicación: 2004

Volume: 114-115

Número: SPEC. ISS.

Páxinas: 151-155

Tipo: Achega congreso

DOI: 10.1016/J.MSEB.2004.07.039 GOOGLE SCHOLAR

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