Atomistic modeling of defect evolution in Si for amorphizing and subamorphizing implants

  1. Lopez, P.
  2. Pelaz, L.
  3. Marqués, L.A.
  4. Santos, I.
  5. Aboy, M.
  6. Barbolla, J.
Revista:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Ano de publicación: 2004

Volume: 114-115

Número: SPEC. ISS.

Páxinas: 82-87

Tipo: Achega congreso

DOI: 10.1016/J.MSEB.2004.07.040 GOOGLE SCHOLAR