Atomistic modeling of ion beam induced defects in Si: From point defects to continuous amorphous layers
- Pelaz, L.
- Marqués, L.A.
- López, P.
- Santos, I.
- Aboy, M.
- Barbolla, J.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 2004
Volume: 810
Pages: 431-436
Type: Conference paper