Dose loss and segregation of boron and arsenic at the Si/SiO2 interface by atomistic kinetic Monte Carlo simulations
- Rubio, J.E.
- Jaraiz, M.
- Martin-Bragado, I.
- Castrillo, P.
- Pinacho, R.
- Barbolla, J.
ISSN: 0921-5107
Argitalpen urtea: 2005
Alea: 124-125
Zenbakia: SUPPL.
Orrialdeak: 392-396
Mota: Biltzar ekarpena