Boron redistribution in pre-amorphized Si during thermal annealing
- Pelaz, L.
- Aboy, M.
- Duffy, R.
- Venezia, V.
- Marqués, L.A.
- López, P.
- Santos, I.
- Hernández, J.
- Bailón, L.A.
- Barbolla, J.
Aktak:
2005 Spanish Conference on Electron Devices, Proceedings
ISBN: 9780780388109
Argitalpen urtea: 2005
Alea: 2005
Orrialdeak: 431-434
Mota: Biltzar ekarpena