Boron redistribution in pre-amorphized Si during thermal annealing

  1. Pelaz, L.
  2. Aboy, M.
  3. Duffy, R.
  4. Venezia, V.
  5. Marqués, L.A.
  6. López, P.
  7. Santos, I.
  8. Hernández, J.
  9. Bailón, L.A.
  10. Barbolla, J.
Actes de conférence:
2005 Spanish Conference on Electron Devices, Proceedings

ISBN: 9780780388109

Année de publication: 2005

Volumen: 2005

Pages: 431-434

Type: Communication dans un congrès

DOI: 10.1109/SCED.2005.1504473 GOOGLE SCHOLAR