Atomistic modeling of ion beam induced amorphization in silicon

  1. Pelaz, L.
  2. Marqués, L.A.
  3. López, P.
  4. Santos, I.
  5. Aboy, M.
  6. Barbolla, J.
Revista:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Ano de publicación: 2005

Volume: 241

Número: 1-4

Páxinas: 501-505

Tipo: Achega congreso

DOI: 10.1016/J.NIMB.2005.07.096 GOOGLE SCHOLAR