Stress distribution mapping of GaAs on Si conformal layers

  1. Martínez, O.
  2. Sanz, L.F.
  3. Jiḿnez, J.
  4. Martín-Martín, A.
  5. Ǵrard, B.
  6. Gil-Lafon, E.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 2007

Volume: 101

Issue: 5

Type: Article

DOI: 10.1063/1.2436840 GOOGLE SCHOLAR