Stress distribution mapping of GaAs on Si conformal layers
- Martínez, O.
- Sanz, L.F.
- Jiḿnez, J.
- Martín-Martín, A.
- Ǵrard, B.
- Gil-Lafon, E.
Revue:
Journal of Applied Physics
ISSN: 0021-8979
Année de publication: 2007
Volumen: 101
Número: 5
Type: Article