Angular distributions of sputtered atoms from semiconductor targets at grazing ion beam incidence angles

  1. Sekowski, M.
  2. Burenkov, A.
  3. Hernández-Mangas, J.
  4. Martinez-Limia, A.
  5. Ryssel, H.
Proceedings:
AIP Conference Proceedings

ISSN: 1551-7616,  0094-243X

ISBN: 9780735405974

Year of publication: 2008

Volume: 1066

Pages: 236-239

Type: Conference paper

DOI: 10.1063/1.3033602 GOOGLE SCHOLAR