Angular distributions of sputtered atoms from semiconductor targets at grazing ion beam incidence angles
- Sekowski, M.
- Burenkov, A.
- Hernández-Mangas, J.
- Martinez-Limia, A.
- Ryssel, H.
ISSN: 1551-7616, 0094-243X
ISBN: 9780735405974
Argitalpen urtea: 2008
Alea: 1066
Orrialdeak: 236-239
Mota: Biltzar ekarpena